Recently added articles from Semiconductor International:
Mask-Level Measurements: Predict Imaging Performance for Flash Designs.
Sep 01, 2008 ... E. van Setten, O. Wismans, K. Grim and J. Finders, ASML Netherlands BV, Veldhoven, Netherlands, www.asml.com; M. Dusa, ASML TDC, Santa Clara, Calif., www.asml.com; R. Birkner, R. Richter and T. ScherA1/4bl, Carl Zeiss SMS GmbH, Jena, Germany, www.smt.zeiss.com/sms Flash memory ...
Keep Rolling With New Bearing Technologies.
Sep 01, 2008 ... Andreas Nobis, Christine Kessler and Johannes Kreuser, Cerobear GmbH, Herzogenrath, Germany, www.cerobear.com Because of growing process demands, standard bearings are more rapidly reaching their limits of employability. With the proper choice of bearing technology, lubricant ...
Treating Copper CMP Wastewater.
Sep 01, 2008 ... Benjamin Roberts, Dean Novy and Chris Jones, Edwards, Wilmington, Mass., www.edwardsvacuum.com; Paul Tan, Jimmy Wang and Chris Lou, Taiwan Semiconductor Manufacturing Co. Ltd. (TSMC), Hsinchu, Taiwan, www.tsmc.com Waste rinses from an actual copper CMP process in a fab were ...
Concentration Sensors Curb Rising CoO.
Sep 01, 2008 ... Ron Chiarello, Jetalon Solutions Inc., Pleasant Hill, Calif., www.jetalon.com, Noritsugu Ishida, Swagelok Co., Solon, Ohio, www.swagelok.com In situ, real-time concentration monitoring will be vital to the industry's move to 65 nm CDs and below to address the need for increased ...
Self-Aligned Double Patterning Gains NAND Flash Favor.
Sep 01, 2008 ... Chris Bencher, Applied Materials Inc., Santa Clara, Calif., www.appliedmaterials.com Whether you call it frequency doubling, pitch reduction, spacer mask patterning or SADP, sidewall spacer transfer patterning techniques are being adopted at an accelerating rate by NAND flash ...
Looking for Truth in Conferences.
Sep 01, 2008; Hand, Aaron ... Aaron Hand, Executive Editor, Electronic Media Autumn is a busy conference time for the lithography world - one piled on top of another as we make our way through September and October. Sematech and partners will have back-to-back updates on immersion and EUV lithographies, with ...
Profitless Prosperity.
Sep 01, 2008 ... Tom Mariano, Vice President, Industrial Equipment Practice, Foliage, Burlington, Mass., www.foliage.com The semiconductor industry may be heading into an "era of profitless prosperity," according to Stephen Newberry, president and CEO of Lam Research Corp. (Fremont, Calif.), in ...
'Superatoms' Open Window to Nanoparticle Energy.
Sep 01, 2008 ... Alexander E. Braun, Senior Editor The principles behind the stability and electronic properties of miniscule nanoclusters of magnetic gold have been described by researchers from the Georgia Institute of Technology (Atlanta), Stanford University (Palo Alto, Calif.), the ...
Chrome Going the Way of the Dodo Bird?
Sep 01, 2008 ... David Lammers, News Editor Chrome, which has served the photomask industry well for decades, may gradually be displaced by a better metal: molybdenum silicide (MoSi). Franklin Kalk, CTO at Toppan Photomasks Inc. (Round Rock, Texas), said he knows of two semiconductor ...
Double Patterning Battles Cost, Complexity.
Sep 01, 2008; Hand, Aaron ... Aaron Hand, Executive Editor, Electronic Media This year's Sokudo Lithography Breakfast Forum at SEMICON West focused on the challenges of double patterning. To be sure, double patterning is not without its challenges, but it nonetheless is positioned as the most promising ...
Scanning Probe Microscope Works Out Solar Cell Profiles.
Sep 01, 2008 ... Alexander E. Braun, Senior Editor There is an ongoing effort by the photovoltaics (PV) industry to use polymers to create solar cells because this would not only enable processing to be done at room temperature and ambient conditions, but would also allow the application of ...
Fine-Tuning CMP.(chemical mechanical planarization)
Sep 01, 2008 ... Ruth DeJule, Contributing Editor The consumables market is developing ways to improve planarity and defectivity while maintaining removal rates and lowering costs - all in the face of evolving applications. With each new technology node, all process windows become ...
Electrochemical Process.
Sep 01, 2008 ... Staff AquiVia was designed to produce conformal, uniform insulation and barrier layers inside a TSV with aspect ratios beyond 10:1. Combined with the company's eG ViaCoat technology, it allows ...
SEM Analysis.
Sep 01, 2008 ... Staff The IGMA SEM provides high-quality imaging and analytical results from a field emission microscope, and has the capability to handle all material types. Materials analysis is provided by X-ray geometry for both energy and wavelength ...
Solar Software.
Sep 01, 2008 ... Staff A second version of FabWorks monitoring and analysis software has been created. The software package includes a server with FabWorks V2 pre-installed that can monitor up to 3000 devices. It is a web server that needs only ...
Line Heater System.
Sep 01, 2008 ... Staff The Relialine 170 heating system improves temperature uniformity by precisely heating individual elbow, tee and VCR fittings. The temperature compensation feature allows the system to increase wattage ...
Standalone Platform.
Sep 01, 2008 ... Staff The Nova T500 is a high-throughput, high-accuracy, standalone optical CD platform. It increases metrology sampling and precision while reducing CoO. Throughput is 250 wph, and allows up to ...
Gas Extension Control System.
Sep 01, 2008 ... Staff A second generation of the Gas Lifetime eXtension (GLX2) control system has been designed for the XLA and XLR series of light sources. It extends the ...
PTFE Coating.
Sep 01, 2008 ... Staff Enduro LF10 is a conformal PTFE coating that can be applied to complex components to improve the performance of elastomeric, thermoplastic or metal substrates by reducing the sticking force and wear caused by friction. For aqueous chemicals and/or their ...
Surface-Mount Devices.
Sep 01, 2008 ... Staff OctoLED devices combine surface-mount technology with the features and capabilities of through-hole, leaded T-5 mm epoxy lens LEDs. They deliver brightness levels up to 7000 mcd, and offer users a variety of ...