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Article: Adept Technology Selected by Tegal's Sputtered Films Subsidiary to Provide Automated Reticle Handling for Thin-Film Deposition Tool.
- Article from:
- Business Wire
- Article date:
- July 14, 2003
CopyrightCOPYRIGHT 2003 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Business Editors/High-Tech Writers
LIVERMORE, Calif.--(BUSINESS WIRE)--July 14, 2003
Thin-Film Deposition Tool to Include Adept's Reticle Loading
Front-End Module, Integrated Robot, Loadport, I/O and Host
Connectivity from Single Cell Controller
Adept Technology, Inc. (OTCBB:ADTK.OB), a leading manufacturer of flexible automation for the semiconductor, electronics, fiber optic, telecommunications, and life sciences industries, today announced that the Sputtered Films subsidiary of Tegal Corporation (Nasdaq:TGAL), a leading semiconductor manufacturer, has selected Adept Technology to provide automated reticle handling for its ...