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Article: Capacitance diaphragm gauge. (Product Preview).
- Article from:
- Semiconductor International
- Article date:
- July 1, 2003
CopyrightCOPYRIGHT 2003 Reed Business Information. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Xac Torr all-digital capacitance diaphragm gauge (CDG) is for vacuum-based thin-film processes. Its advanced digital signal processor eliminates the need for analog processing within the device. The gauge can be used in advanced 300 mm and current 200 mm wafer processing systems. It features embedded self-diagnostics to enable in-situ diagnostics without ...
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