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Article: Integrated FIB/SEM systems streamline throughput; the fusing of focused ion beam and scanning electron microscope technologies into one tool has expedited subsurface defect review and characterization in materials research. Additionally, increased automation and ease-of-use are promoting the use of FIB/SEM workstations.(Keywords)
- Article from:
- R & D
- Article date:
- November 1, 2003
- Author:
CopyrightCOPYRIGHT 2003 Advantage Business Media. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Prior to the creation of integrated focused ion beam/scanning electron microscope (FIB/ SEM) systems, the detection and characterization of subsurface defects in materials posed a major obstacle. Without FIB, defect analysis below the surface of micro- and nanostructures was done blindly, and the characterization of these defects was challenging, if not impossible, when using only SEM. To improve the process, separate FIB and SEM instruments were employed, with the specimen being moved repeatedly between the two devices. However, this continual back and forth shuffle was time consuming.
To save time and further facilitate the probing and classification of ...