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Article: Advanced MEMS fabrication using CMP.
- Article from:
- Semiconductor International
- Article date:
- August 1, 2004
- Author:
CopyrightCOPYRIGHT 2004 Reed Business Information. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Developed in the research laboratories over the past 15 years, microsystems and the accompanying fabrication techniques have recently begun to move from the labs onto the manufacturing floors. Typical MEMS products, which are already fabricated in large quantities, include acceleration sensors, gyroscopes and pressure sensors for the automotive industry. Optical switches for optical fiber networks and RF switches for tunable capacitors, filters or antennas for cell phones are typical telecom applications. Printing heads for inkjet printers or read/write heads for hard disk drives are used in bulk quantities in office applications. Market forecasts predict annual growth ...