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Article: Dip pen nanolithography heats up.(Lithography)
- Article from:
- Semiconductor International
- Article date:
- October 1, 2004
- Author:
CopyrightCOPYRIGHT 2004 Reed Business Information. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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As we march along the inexorable path toward nanotechnology, there is a seemingly endless array of ideas about how to get there. One increasingly popular idea is dip pen nanolithograpby (DPN), which uses atomic force microscopy (AFM) probes to write nanometer-scale lines directly onto a substrate. Now researchers from the Georgia Institute of Technology (Atlanta) and the Naval Research Laboratory (NRL, Washington) have improved upon the technique, using heat to achieve some important new capabilities. Dubbed thermal dip pen nanolithography (tDPN), the new technique overcomes previous limitations that have been encountered by dozens of research groups.
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