|
|
Article: Mattson Technology Announces Additional 300 mm Strip Systems Purchased By Major US Chipmaker; Aspen III ICP Strip Systems Demonstrate Production Capability for Advanced Devices.
- Article from:
- PR Newswire
- Article date:
- July 9, 2003
CopyrightCOPYRIGHT 2003 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
Mattson Technology, Inc. , a leading supplier of advanced process equipment used to manufacture semiconductors, today announced a multi-million dollar order to supply multiple Aspen III ICP Strip systems to a major North American IC logic manufacturer. The 300 mm tools, the first of which shipped in May 2003, will be used for advanced low-k applications and other resist strip and residue removal processes in the back-end-of-line processing.
"Our customer chose the Aspen III Strip based on its demonstrated ability to preserve the k value of its most advanced dielectric for 90 nm production," said Douglas K. Walker, director of North American operations of Mattson ...