|
|
Article: Major Taiwanese Foundry Places Additional Orders for Mattson Technology's 300 mm Aspen III Highlands and Strip Systems; Systems to be Used for FEOL and BEOL Processing for Foundry's 300 mm Fab Ramp.
- Article from:
- PR Newswire
- Article date:
- July 15, 2003
CopyrightCOPYRIGHT 2003 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
Mattson Technology, Inc. , a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has received a follow-on order for 300 mm Aspen III Highlands and Aspen III Strip systems from a major Taiwanese foundry. The systems will be used for front-end-of-line (FEOL) and back-end-of-line (BEOL) advanced low-k/copper cleaning applications in the foundry's 300 mm production facilities. System deliveries are expected to begin shipment by the end of July 2003.
"Our Aspen Strip systems are widely used throughout this foundry's 200 mm and 300 mm fabs, where they play a key part in manufacturing of its most advanced chips," ...