Article: ADE Rolls Out its Next-Generation Wafer Inspection Tool; WaferXam System Delivers High Sensitivity and Superior Defect Classification at Production Throughputs.

WESTWOOD, Mass. -- ADE Corporation (Nasdaq: ADEX) today announced the WaferXam(TM), ADE's latest-generation nano-particle inspection and defect classification tool. This advanced darkfield laser scanning system is used for inspection of prime silicon substrates at semiconductor incoming quality control and silicon wafer suppliers, where advanced design rules require more real-time measurement and inspection for cost-effective process control. The WaferXam tool features a new system design, utilizing enhancements to ADE's patented Angle Resolved Scatter architecture, for highly improved defect detection sensitivity and classification performance.

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