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Article: ADE Rolls Out its Next-Generation Wafer Inspection Tool; WaferXam System Delivers High Sensitivity and Superior Defect Classification at Production Throughputs.
- Article from:
- Business Wire
- Article date:
- June 29, 2005
CopyrightCOPYRIGHT 2005 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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WESTWOOD, Mass. -- ADE Corporation (Nasdaq: ADEX) today announced the WaferXam(TM), ADE's latest-generation nano-particle inspection and defect classification tool. This advanced darkfield laser scanning system is used for inspection of prime silicon substrates at semiconductor incoming quality control and silicon wafer suppliers, where advanced design rules require more real-time measurement and inspection for cost-effective process control. The WaferXam tool features a new system design, utilizing enhancements to ADE's patented Angle Resolved Scatter architecture, for highly improved defect detection sensitivity and classification performance.
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