|
|
Article: Mattson Technology's Aspen III eHighlands Selected by Major North American Chipmaker.
- Article from:
- PR Newswire
- Article date:
- July 13, 2005
CopyrightCOPYRIGHT 2005 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
New Strip System to Support Advanced 65 nm Chip Production and 45 nm Process Development
FREMONT, Calif., July 13 /PRNewswire-FirstCall/ -- Mattson Technology, Inc. , a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a major US chipmaker has selected its new 300 mm Aspen III eHighlands dry strip system for advanced 65 nm chip production and 45 nm process development. The repeat order follows previously announced sales to a leading Chinese foundry and ATDF, SEMATECH's R&D wafer fab in Austin, TX. The tool, which will join other Highlands and inductively coupled plasma (ICP) systems already installed at ...