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Article: Major Taiwanese DRAM Chipmaker Places Follow-on Orders for Mattson Technology Aspen III ICPHT Strip System for Next Phase of 300 mm Fab Expansion.
- Article from:
- PR Newswire
- Article date:
- March 28, 2006
CopyrightCOPYRIGHT 2006 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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FREMONT, Calif., March 28 /PRNewswire-FirstCall/ -- Mattson Technology, Inc. , a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a major Taiwanese DRAM chipmaker has placed follow-on orders for Mattson's Aspen III ICPHT strip system for the next expansion phase of its 90 nm, 300 mm fab. The strip systems will begin shipment in the second quarter of 2006 and will join Mattson's Helios RTP systems, which are already in production for the development of advanced transistor structures.
"The Aspen III ICPHT continues to be this DRAM manufacturer's tool of record for photoresist strip based on the system's proven ...