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Article: Surface Technology Systems Wins Two Million Pound Order for MEMS Production Equipment.
- Article from:
- PR Newswire
- Article date:
- March 28, 2006
CopyrightCOPYRIGHT 2006 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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NEWPORT, Wales, March 28 /PRNewswire-FirstCall/ -- Surface Technology Systems plc (STS) , a leader in plasma processing technologies used in the manufacturing and packaging of advanced electronic devices, today announced that it has received an order worth over 2 million pounds Sterling from a major manufacturer for Micro-Electro-Mechanical Systems (MEMS) production equipment.
The order includes multiple Pegasus processing chambers for deep silicon micromachining of MEMS for use in consumer end-products. The Pegasus source offers significantly higher silicon etch rates than other deep reactive ion etch (DRIE) tools currently on the market. STS offers a choice ...