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Article: Litho Tools Find New Life in Special Applications.(integrated circuit manufacturing by various lithography techniques)
- Article from:
- Semiconductor International
- Article date:
- September 1, 2006
- Author:
CopyrightCOPYRIGHT 2006 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Aaron Hand, Managing Editor
Given how we're always looking ahead at the coming generations of IC manufacturing, it can be easy to forget that there is still plenty of use out there for older technologies. But indeed, older platforms, including 248 nm systems, are being re-engineered to take on new challenges in growing markets.
ASML (Veldhoven, Netherlands) has had a Special Applications division for more than eight years, established to find new markets for tools in the company's existing product portfolio. Many of the markets are small, but nonetheless make up a significant source of revenue for technologies that have already seen sizable returns on ...