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Article: Minimize Vibration, Improve Motion Control Performance.(Motion Controls Inc.)
- Article from:
- Design News
- Article date:
- September 25, 2006
- Author:
CopyrightCOPYRIGHT 2006 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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By Boaz Kramer, ACS Motion Control Inc.
Understanding the various methods to reduce the impact of vibration is essential in semiconductor industry systems
Designers of motion control systems for the semiconductor industry are consistently confronted with increasing demands for higher performance. To produce more semiconductors faster and at a lower cost, semiconductor manufacturers rely on continuous improvement in motion control systems.
In the semiconductor manufacturing process, inspection usually involves positioning the silicon wafer relative to optical (or other) components by placing the wafer on a high-speed XY stage. Higher velocities ...