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Article: Single-stage dry scroll pump.(AVS 54th International Symposium and Exhibition: Oct. 14-19 * Seattle, WA * www.avs.org)
- Article from:
- Laboratory Equipment
- Article date:
- August 1, 2007
CopyrightCOPYRIGHT 2007 Advantage Business Media. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Booth 301. With a base pressure of 380 milliTorr, the ULVAC DISL-100 4.2-cfm dry scroll pump fills the ultimate pressure void left between diaphragm pumps (typically 1.5 Torr) and two-stage scroll pumps (as low as 7.5 milliTorr). The single-stage scroll design enables the pump to offer superior ...
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