Article: Single-stage dry scroll pump.(AVS 54th International Symposium and Exhibition: Oct. 14-19 * Seattle, WA * www.avs.org)

Booth 301. With a base pressure of 380 milliTorr, the ULVAC DISL-100 4.2-cfm dry scroll pump fills the ultimate pressure void left between diaphragm pumps (typically 1.5 Torr) and two-stage scroll pumps (as low as 7.5 milliTorr). The single-stage scroll design enables the pump to offer superior ...

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