Article: High speed, sub-micron positioning, voice coil stages.(Tools of the Trade)(Equipment Solutions Inc.'s VCS-1 OH Voice Coil Stage)(Brief article)

Sub-micron, 150-nm positioning resolution, voice coil stages are compact, can be used as a horizontal or vertical axis, and are low cost.

The high-speed, 10 mm travel, Equipment Solutions', VCS-1 OH Voice Coil Stage features an integrated non-contact optical and/or digital position feedback sensor for 200 nm repeatability. The ...

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