|
|
Article: Nanometrics ships fully automated flat panel inspection system; NanoSpec 5500 is industry's first 650x550mm flat panel metrology system.
- Article from:
- Business Wire
- Article date:
- May 23, 1995
CopyrightCOPYRIGHT 1995 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
SAN JOSE, Calif.--(BUSINESS WIRE)--May 23, 1995--Nanometrics Incorporated announced today that the Company had successfully shipped and installed its first NanoSpec 5500 flat panel film thickness measurement system at LG Electronics Incorporated's new manufacturing facility in Kyoungsangbuk, Korea (LG Electronics, formerly Goldstar Co. Ltd). The NanoSpec 5500 is the industry's first automated inspection system to accommodate substrates up to 650x550 millimeters, allowing manufacturers to precisely measure film thicknesses over an area equal to six 10-inch flat panel displays (FPD).
The NanoSpec 5500 is a non-contact, thin film metrology system which was designed ...