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Article: Nanometrics and J.A. Woollam announce agreement; embedded ellipsometer extends capability of NanoSpec 8000 metrology system.
- Article from:
- Business Wire
- Article date:
- May 10, 1995
CopyrightCOPYRIGHT 1995 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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SAN JOSE, Calif.--(BUSINESS WIRE)--May 10, 1995--Nanometrics Incorporated (Nanometrics) (NASDAQ:NANO) and J.A. Woollam Co., Inc. (Woollam) of Lincoln, Nebraska, announced today that the two companies have signed an agreement to coordinate work to integrate Woollam's spectroscopic ellipsometer into Nanometrics' recently announced NanoSpec 8000 Automated Film Thickness Measurement System.
This integration optimizes the capabilities of the NanoSpec 8000 to perform measurements and analysis of thin-films on advanced semiconductor wafers.
Spectroscopic ellipsometry is used to measure both the thickness and the refractive index for compositional control of a wide ...