Article: Rudolph Technologies and Entrepix, Inc. Announce License Agreement.

Entrepix to market Rudolph AutoEL Series Ellipsometer

FLANDERS, N.J. -- Rudolph Technologies, Flanders, New Jersey, and Entrepix, Inc., Tempe, Arizona, announced today that Rudolph has granted Entrepix an exclusive license to manufacture, sell, service and support the Rudolph AutoEL([R]) series of thin-film ellipsometers. The AutoEL([R]) was the first microprocessor-based automated ellipsometer and is recognized worldwide as a high-performance, high-precision instrument used in the measurement of film thickness. Thousands of AutoEL tools have been placed in universities, semiconductor research labs and semiconductor production lines since it was commercialized in ...

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