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Article: Nanometrics Introduces Industry's First 300mm Metrology System; New NanoSpec 8300 Tests Wafers up to Twelve Inches in Diameter.
- Article from:
- Business Wire
- Article date:
- July 10, 1995
CopyrightCOPYRIGHT 1995 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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SAN FRANCISCO--(BUSINESS WIRE)--July 10, 1995--Nanometrics Incorporated (NASDAQ: NANO) today introduced its NanoSpec 8300, the semiconductor industry's first ever 300mm film thickness measurement system. The NanoSpec 8300 handles multiple wafer sizes, ranging in diameter from 100mm to 300mm (four to twelve inches). Additionally, the Model 8300 combines both a spectroscopic ellipsometer and a spectrophotometer, giving the system the ability to precisely measure virtually any dielectric film used in semiconductor manufacture today. Nanometrics made the announcement in conjunction with this week's opening of SemiCon West, the semiconductor industry's largest trade show, and ...