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Article: STS Receives Order for Pegasus DRIE Tool from TU Dresden.
- Article from:
- PR Newswire
- Article date:
- March 18, 2008
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Copyright informationCOPYRIGHT 2008 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Technische Universitat Dresden orders Pegasus system for advanced packaging research and development
NEWPORT, United Kingdom, March 18 /PRNewswire/ -- Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a Pegasus Deep Reactive Ion Etch (DRIE) tool to the Institut fur Halbleiter- und Mikrosystemtechnik (IHM, or Semiconductor & Microsystems Technology Laboratory), part of the Technische Universitat Dresden.
The Technische Universitat Dresden dates back to the Technische Bildungsanstalt ...
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