Article: STS Receives Order for Pegasus DRIE Tool from TU Dresden.

Technische Universitat Dresden orders Pegasus system for advanced packaging research and development

NEWPORT, United Kingdom, March 18 /PRNewswire/ -- Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a Pegasus Deep Reactive Ion Etch (DRIE) tool to the Institut fur Halbleiter- und Mikrosystemtechnik (IHM, or Semiconductor & Microsystems Technology Laboratory), part of the Technische Universitat Dresden.

The Technische Universitat Dresden dates back to the Technische Bildungsanstalt ...

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