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Article: Piezo Nanopositioning Stages.
- Article from:
- Semiconductor International
- Article date:
- May 1, 2008
CopyrightCOPYRIGHT 2008 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Staff
The PIHera family of flexure-guided piezo nanopositioning stages offers travel ranges to 1.8 mm. They can be used for scanning probe applications and static positioning. The stages provide sub-nanometer resolution, ...
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...The P-620 Series miniature nanopositioning stages provide linear travel ranges to 1 mm and sub-nanometer resolution in a package as small as 30 x 30 x 12 mm. The systems are ...
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