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Article: Three-dimensional integration on carbon nanotube wafers.(Electronics)
- Article from:
- New Materials Asia
- Article date:
- June 1, 2008
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Japan's National Institute of Advanced Industrial Science and Technology (AIST) has manufactured integrated three-dimensional (3-D) carbon nanotube components by using single-layer carbon nanotubes. The so-called "carbon-nanotube wafer" was developed using densely aligning carbon nanotubes which were then subjected to a novel lithography microfabrication techniques.
The new technology made it possible to form any shape of electronic parts in any place. For example, AIST says it integrated more than a thousand 3-D carbon nanotube electronic parts on a substrate and electrically drove the component.
The carbon nanotube wafer is manufactured as follows:
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