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Article: Tegal delivers multisystem order to major Asic manufacturer for noncritical etch applications.
- Article from:
- Business Wire
- Article date:
- April 16, 1996
CopyrightCOPYRIGHT 1996 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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PETALUMA, Calif.--(BUSINESS WIRE)--April 16, 1996--Tegal Corporation (Nasdaq: TGAL) has delivered a multisystem order from a major Silicon Valley application specific integrated circuit (ASIC) manufacturer for the company's 980 and 903e series noncritical etch systems.
The six system order, consisting of four 980 and two 903e etchers, have been delivered to semiconductor facilities in Silicon Valley and Texas for 200- and 150-mm wafer noncritical pad etch applications on advanced devices. Initial delivery began in the fourth quarter of 1995.
For pad etch applications, the 900 series systems are capable of etching dielectric films and TiN (ARC) layers, both ...