Article: Cymer Unveils GLX2; Second-Generation Gas Lifetime Extension Control System.

Article: Cymer Unveils GLX2(TM); Second-Generation Gas ...
Business Wire;  July 14, 2008 ;     700+ words ... ... its second-generation Gas Lifetime eXtension (GLX2[TM]) control system for the XLA and XLR series ... first-generation GLX control system. The only production ... late 2007. With a GLX control system on the light source ...

Article: Gas Extension Control System.
Semiconductor International;  September 1, 2008 ;     419 words ...Staff A second generation of the Gas Lifetime eXtension (GLX2) control system has been designed for the XLA and XLR series of light sources. It extends the maximum time between light source gas exchange from ...

Article: Cymer Introduces Gas Lifetime eXtension to Increase ...
Business Wire;  November 27, 2007 ;     700+ words ... ... the world's leading supplier of excimer laser light sources used in semiconductor manufacturing, today introduced the Gas Lifetime eXtension (GLX) product. A stand-alone upgrade for new and installed systems, GLX increases chipmaker scanner output ...

Article: Cymer Unveils Upgrades for XLA Products
Wireless News;  February 26, 2008 ;     442 words ... ... CD) control, in addition to Gas Lifetime eXtensionTM (GLXTM) control system technology to enable increased ... LNM) in addition to the GLXTM control system. While the GLXTM control system improves system uptime and bandwidth ...

Article: Laser Extension System.
Semiconductor International;  October 15, 2008 ;     397 words ...Staff A second generation of the Gas Lifetime eXtension (GLX2) control system has been designed for the XLA and XLR series of light sources. It extends the maximum time between light source gas exchange from ...

Article: United States: Cymer Inks Multi-Unit Light Source Agreement with ...
TendersInfo;  July 9, 2008 ;     697 words ... ... source support through Cymer s By the Pulse Program. Toshiba will also benefit from the Cymer s Gas Lifetime eXtensionTM (GLX) control system which will come integrated on lasers, extending the gas refill interval from 100 million pulses ...

Article: Cymer Inks Multi-Unit Light Source Agreement with Toshiba; ...
Business Wire;  July 8, 2008 ;     700+ words ... ... support through Cymer's By the Pulse Program. Toshiba will also benefit from the Cymer's Gas Lifetime eXtension(TM) (GLX) control system which will come integrated on lasers, extending the gas refill interval from 100 million pulses ...