Article: BeSang, National NanoFab Center, and Stanford University NanoFab Develop Breakthrough 3D IC Technology.

In collaboration with the National NanoFab Center (NNFC) in Daejeon, Korea and Stanford NanoFab (SNF) in Palo Alto, CA, BeSang Inc., a semiconductor company based in Beaverton, OR, has successfully developed a breakthrough three-dimensional (3D) integrated circuit (IC) technology, enabling low-cost memories and high-performance logic products with large embedded memory blocks (see also BeSang Inc.).

This 3D IC has been processed on 8 inch wafers with industry standard 0.18 um CMOS technologies both at NNFC and SNF. The chip contains 128 million vertically oriented devices as a test vehicle. It is uniquely processed at low temperatures, below 400 degree Celsius. A ...

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