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Article: Gas Extension Control System.
- Article from:
- Semiconductor International
- Article date:
- September 1, 2008
CopyrightCOPYRIGHT 2008 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Staff
A second generation of the Gas Lifetime eXtension (GLX2) control system has been designed for the XLA and XLR series of light sources. It extends the ...
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