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Article: Sanders to develop Point Source X-Ray Lithography System.
- Article from:
- Business Wire
- Article date:
- March 21, 1997
CopyrightCOPYRIGHT 1997 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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NASHUA, N.H.--(BUSINESS WIRE)--March 21, 1997--Sanders, a Lockheed Martin Company, has been selected by the Defense Advanced Research Projects Agency (DARPA) to demonstrate a stand-alone X-Ray exposure system which will enhance capabilities of semiconductor manufacturers to print monolithic microwave integrated circuits (MMICs) with fine dimensions at high throughput levels.
Under a $10.5 million contract, Sanders Microwave Electronics Division will manage the design, development and demonstration of a Point Source X-Ray Lithography System. The system includes an X-Ray stepper, X-Ray point source and beamline interface which connects the stepper and the ...