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Article: Research results from V.I. Kolobov and colleagues update understanding of fusion technology.
- Article from:
- Journal of Engineering
- Article date:
- May 20, 2009
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According to recent research from the United States, "We describe state-of-the-art simulations of weakly ionized low-temperature plasmas for modern technologies. Emphasis is placed on fluorocarbon plasmas for manufacturing microelectronic devices and plasmas of rare gases for excimer lamps."
"Electron kinetics plays a crucial role in these plasmas. We illustrate the specifics of electron kinetics in different types of gas discharges. We evaluate the availability and quality of electron collision cross sections (total and differential) for elastic collisions with neutral species, excitation of electronic levels of atoms and internal levels of molecules, as well as ...