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Article: Applied Materials Developing Next-Generation Automatic Defect Classification Technology With SEMATECH.
- Article from:
- Business Wire
- Article date:
- December 12, 1997
CopyrightCOPYRIGHT 1997 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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SANTA CLARA, Calif.--(BUSINESS WIRE)--Dec. 12, 1997--
SEM-Based Automatic Defect Classification (ADC) Technology
Will Enhance Sub-0.25 Micron Device Yield
Applied Materials, Inc. has partnered with SEMATECH to develop an advanced Scanning Electron Microscope (SEM)-based automatic defect classification (ADC) system. This high-speed defect review system will be used on future semiconductor wafers with feature sizes of 0.18 micron and below.
Fred Lakhani, SEM/ADC project manager at SEMATECH, said, "Our member companies are eager to deploy the SEM-based ADC technology in their leading-edge semiconductor manufacturing fabs as ...