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Article: New microelectromechanical systems research from University of Michigan described.
- Article from:
- Nanotechnology Weekly
- Article date:
- July 6, 2009
CopyrightCOPYRIGHT 2009 NewsRX. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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"Two versions of microdischarge-based pressure sensors, which operate by measuring the change, with pressure, in the spatial current distribution of pulsed dc microdischarges, are reported. The inherently high temperatures of the ions and electrons in the microdischarges make these devices amenable to high-temperature operation," scientists writing in the Journal of Microelectromechanical Systems report.
"The first sensor type uses 3-D arrays of horizontal bulk metal electrodes embedded in quartz substrates with electrode diameters of 1-2 mm and 50-100-mu m interelectrode spacing. These devices were operated in nitrogen over a range of 10-2000 torr, at ...