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Article: Researchers at Stanford University target electron devices.
- Article from:
- Electronics Newsweekly
- Article date:
- October 7, 2009
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According to a study from the United States, "The effect of oxygen on the work function of tungsten electrodes has been studied. As expected, it was found that the presence of the metastable A15 (beta) phase is correlated with oxygen concentration."
"Tungsten films with minimal oxygen content contain only the stable bee (alpha) phase. However, after a forming gas anneal was performed on MOS capacitors made from these films, it was found that the beta phase converts completely to a strained alpha phase. Despite this uniform transformation, it was found that the work function of the tungsten gate electrodes varies from 4.54-4.91 eV, depending on the partial ...