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Article: Make a successful transition from differential pressure sensors to MEMS mass flow sensors.(MEMS)
- Article from:
- ECN-Electronic Component News
- Article date:
- September 1, 2009
- Author:
CopyrightCOPYRIGHT 2009 Advantage Business Media. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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There are advantages in using a MEMS (Micro-Electro-Mechanical-System) Mass Flow Sensor to measure flow, rather than the indirect method of using a differential pressure sensor. However, there are fundamental differences in the technology that must be understood to make a successful transition.
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As requirements for higher measurement resolution increase, particularly in the low, zero-cross point range, MEMS mass flow sensors provide a distinct advantage over differential pressure sensors because they have an inverted output curve shape. A differential pressure sensor curve flattens out at the zero-cross-point, making it difficult to ...