Article: Tessera to Present at International Symposium on Immersion Lithography Extensions.

Article: Tessera to Make Presentation at International Symposium on ...
Health & Beauty Close-Up;  October 19, 2009 ;     555 words ... ... International Symposium on Immersion Lithography Extensions on the latest in modeling ... elements (DOEs) in immersion lithography. James Carriere, Senior ... Illumination (OAI) in Immersion Lithography." The presentation ...

Article: Industry takes a hard look at immersion ...
Semiconductor International;  March 1, 2003 ;     700+ words ... ... SEMICON West, Tony Yen pointed to immersion lithography as a way to extend optical lithography ... 100 people gathered for ISMT's Immersion Lithography Workshop in San Francisco in December ... question at hand is whether making immersion lithography work in a production environment ...

Article: SIGMA-C Adds Immersion Lithography Simulation to ...
Business Wire;  August 18, 2003 ;     700+ words ... ... process development for liquid immersion lithography with recent upgrades to its flagship ... SOLID-C 6.2 in July 2003. In immersion lithography, a fluid is placed between a wafer ... nanometer node. This is because immersion lithography would allow chipmakers to continue ...

Article: SIGMA-C Expands Features on Immersion Lithography ...
Business Wire;  February 25, 2004 ;     700+ words ... ... the viability of adopting liquid immersion lithography in their own facilities. Enhancing ... obstacles that hinder the adoption of immersion lithography. This is achieved by expanding ... hyper-NA effects." Liquid immersion lithography (LIL) is rapidly gaining industry ...

Article: Nikon Announces Immersion Lithography Product ...
Business Wire;  December 1, 2003 ;     700+ words ... ... fundamental technologies related to immersion lithography. Semiconductor tool manufacturers ... semiconductor manufacturers will require immersion lithography for device shrinks below 65 nm ... consequently decided to move ArF immersion lithography to the development stage with a ...

Article: Immersion lithography looks like ...
Semiconductor International;  January 1, 2004 ;     700+ words ... ... time to jump off the fast train to immersion lithography, but most of the industry seems ... last month the industry's first immersion lithography system, also announcing that TSMC ... which has been the key driver for immersion lithography, is scheduled to take delivery ...

Article: KLA-Tencor Addresses Immersion Lithography ...
Business Wire;  December 6, 2006 ;     700+ words ... ... generation, including those of immersion lithography. KLA-Tencor is launching a new ... accuracy, a critical element in immersion lithography. "Customers are asking us for ... ramps, whether their challenge is immersion lithography, new materials, new chip structures ...