|
|
Article: Eaton Thermal Processing Systems Announces Sale of Compact II Fast Ramp Vertical Furnace To Major U.S. Semiconductor Manufacturer
- Article from:
- PR Newswire
- Article date:
- August 10, 1998
CopyrightCOPYRIGHT 1998 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
System is Chosen For its Superior Process Capability, 300mm Transition Ease
BEVERLY, Mass., Aug. 10 /PRNewswire/ -- Eaton Thermal Processing Systems (TPS) today announced the sale of its Compact II fast ramp vertical furnace to a leading U.S. semiconductor manufacturer. The system, which was shipped at the end of June, was chosen for its superior process capability for critical low temperature applications. It will be used to develop furnace based reflow processes as part of the customer's migration to 300mm wafer production.
The Compact II is the first fast ramp vertical furnace to offer two thermal processing chambers in single, small footprint. ...