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Article: Report summarizes ceramic processing research study findings from S. Heo and co-researchers.(Report)
- Article from:
- Journal of Technology
- Article date:
- November 3, 2009
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According to a study from South Korea, "The occurrence of polytype domains in the central region decreases the yield of wafers, when large diameter 6H-, 4H-silicon carbide(SiC) single crystals are grown by a sublimation method. Accordingly, the suppression of polytype domains is very important."
"Previous studies revealed that polytype domains occur in SiC crystals during the growth process and the domains were based on the root of micropipes and macro-defects. However, in spite of many studies and much development, the suppression of polytype domains has not been perfectly solved. In this study, we verified the systematic experimental results that the ...