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Article: New microelectromechanical systems research from University of Leuven described.
- Article from:
- Nanotechnology Weekly
- Article date:
- November 2, 2009
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"Future microrobotic applications require actuators that can generate a high actuation force in a limited volume. Up to now, little research has been performed on the development of pneumatic or hydraulic microactuators, although they offer great prospects in achieving high force densities," scientists writing in the Journal of Microelectromechanical Systems report.
"In addition, large actuation strokes and high actuation speeds can be achieved by these actuators. This paper describes a fabrication process for piston-cylinder pneumatic and hydraulic actuators based on etching techniques, UV-definable polymers, and low-temperature bonding. Prototype actuators with ...