|
|
Article: Research on microelectromechanical systems reported by scientists at University of Florida.
- Article from:
- Nanotechnology Weekly
- Article date:
- November 2, 2009
CopyrightCOPYRIGHT 2009 NewsRX. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
"This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micro machining and bulk silicon micromachining based on silicon-on-insulator wafers," scientists in the United States report.
"The device has 3-DOF of actuations, including rotations around two axes in the mirror plane, and out-of-plane piston actuation. The micromirror shows an optical scan range of +/- 30. about both x-and y-axes and displaces 480 mu m in the z-axis, all at dc voltages that are less than 8 V. Dynamic ...