|
|
Article: Applied Materials Delivers Advanced Copper Technology for FPD Manufacturing on AKT-PiVot PVD System.
- Article from:
- Biotech Week
- Article date:
- November 11, 2009
CopyrightCOPYRIGHT 2009 NewsRX. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
|
Applied Materials, Inc. announced that it has expanded its breakthrough AKT- PiVot™ 55KV PVD* system to include advanced copper deposition processing for manufacturing TFT-LCD* flat panel displays (FPD). Using the PiVot system, FPD manufacturers can transition from aluminum to copper bus lines to achieve faster pixel response and lower power consumption in next-generation LCD-TV panels. The PiVot system delivers benchmark, cost-efficient copper deposition performance by combining high deposition rates, efficient target utilization and long maintenance intervals with enhanced film morphology (see also Applied Materials, Inc.).
Key to the PiVot system's ...