Article: New research on materials science from Jilin University summarized.

According to recent research from Changchun, People's Republic of China, "Zr-N films were grown on glass and Si (100) substrate by radio-frequency magnetron sputtering using a mixture of high pure nitrogen and argon as sputtering gases. The structure and properties of Zr-N compounds in the films change with N-2/(N-2+Ar) flow ratio (R-N2)."

"At low R-N2, a ZrN alloy with the rocksalt structure (denoted as gamma-ZrNx) is formed. The N concentration x and lattice constant increases with increasing R-N2, and x reaches 1 when the R-N2 goes up to 20%. As the R-N2 exceeds 20%, the film is composed of gamma-ZrN and Zr3N4 phase with Th3P4 structure (denoted as c-Zr3N4). ...

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