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Article: Rudolph's Automated Data Analysis Software Improves Yield in MEMS Inspection.
- Article from:
- Business Wire
- Article date:
- November 9, 2009
CopyrightCOPYRIGHT 2009 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Touch Micro-SystemTech adds NSX with Discover Software to dramatically reduce per-wafer inspection time
FLANDERS, N.J. -- Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, announced today that Touch Micro-System Tech (tMt), a major manufacturer of micro-electro-mechanical systems (MEMS) located in Taiwan, has reported a substantial reduction in per-wafer inspection time using Rudolph's NSX([R]) Inspection System and Discover([R]) Data Analysis software. Discover, which is the NSX's automated data analysis program, allows the user to rapidly identify, classify, sort ...