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Article: ATMI Announces New Sub-Atmospheric Gas Delivery System; NovaSource Unit Offers Unique Gas Delivery System for HDP-CVD.
- Article from:
- Business Wire
- Article date:
- February 3, 1999
CopyrightCOPYRIGHT 1999 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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DANBURY, CT--(BUSINESS WIRE)--February 3, 1999--ATMI, Inc. (Nasdaq: ATMI), today announced that its NovaSource business is offering new sub-atmospheric gas delivery systems to the semiconductor industry for high-density plasma (HDP) chemical vapor deposition (CVD) following successful customer testing.
Results of qualification testing at a major North American semiconductor manufacturer validated sub-atmospheric gas sources for use with HDP-CVD systems in production manufacturing. NovaSource's new sub-atmospheric phosphine (PH3) source enabled the rapid integration of HDP-CVD phosphosilicate glass (PSG), a film that is finding use as a pre-metal dielectric for ...