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Article: Chemical Leak at Tokyo Electron Arizona Posed No Threat to Local Community.
- Article from:
- Business Wire
- Article date:
- August 6, 1999
CopyrightCOPYRIGHT 1999 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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GILBERT, Ariz.--(BUSINESS WIRE)--Aug. 6, 1999--
Tokyo Electron Arizona Inc. (TAZ), a subsidiary of Japan-based Tokyo Electron Limited (TEL) and manufacturer of metallization equipment for the worldwide semiconductor industry, Friday confirmed that the highly publicized Chlorine Trifluoride (ClF3) gas leak at 5:30 p.m. on Monday, Aug. 2 in its Gilbert facility posed no threat to the local community.
The gas leak, falsely reported as a chemical spill, was determined to be caused by a faulty internal valve within the gas abatement system.
Although the leak was minimal, Monday's incident was treated as full scale Hazardous Materials alarm, partially ...