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Article: Lambda Physik Ramps Up Production for Lithography Excimer Lasers.
- Article from:
- PR Newswire
- Article date:
- December 2, 1999
CopyrightCOPYRIGHT 1999 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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FT. LAUDERDALE, Fla., Dec. 2 /PRNewswire/ -- Lambda Physik, a majority owned subsidiary of Coherent, Inc. (Santa Clara, CA) (Nasdaq: COHR), is ramping up production of its NovaLine(R) K2010 lithography excimer lasers. With outstanding performance, an aggressive cost of ownership, high uptime, and a flexible support plan, NovaLine litho lasers have demonstrated their ability to meet the stringent demands of the semiconductor industry. The first multiple unit orders for a fab environment have been received and more are expected from major IC manufacturers. Shipments for the first production orders have already begun.
The NovaLine K2010 is a Krypton-Fluoride, 248 ...