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Article: Numerical Technologies phase shifting produces first 25nm transistor gates using 248nm optical lithography equipment.
- Article from:
- M2 Presswire
- Article date:
- May 31, 2000
CopyrightCOPYRIGHT 2000 Normans Media Ltd. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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M2 PRESSWIRE-31 May 2000-Numerical Technologies: Numerical Technologies phase shifting produces first 25nm transistor gates using 248nm optical lithography equipment (C)1994-2000 M2 COMMUNICATIONS LTD
RDATE:31052000
San Jose, California, USA -- Numerical Technologies, Inc. (NASDAQ: NMTC) today announced the successful fabrication of the world's first 25nm transistor gates produced entirely by optical lithography. The 25nm (0.025micron) transistor gates on the integrated circuit (IC) were achieved using Numerical's patented phase-shifting technology and DUV 248nm optical lithography.
This achievement marks the first time 248nm lithography ...