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Article: Numerical Technologies Phase Shifting Produces First 25 Nanometer Transistor Gates Using 248 nm Optical Lithography Equipment.
- Article from:
- Business Wire
- Article date:
- May 31, 2000
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Business Editors/High Tech Writers
SAN JOSE, Calif.--(BUSINESS WIRE)--May 31, 2000
Numerical Technologies, Inc. (Nasdaq:NMTC) today announced the successful fabrication of the world's first 25 nm transistor gates produced entirely by optical lithography.
The 25 nm (0.025 micron) transistor gates on the integrated circuit (IC) were achieved using Numerical's patented phase-shifting technology and DUV 248 nm optical lithography.
This achievement marks the first time 248 nm lithography equipment has produced a 25 nm transistor gates. This achievement comes three months after a February release announcing the first 50 nm transistor gates ...