Article: Brooks Automation, Inc. Cluster Tool Shipments Surpass 1000.

Business/Technology Editors

CHELMSFORD, Mass.--(BUSINESS WIRE)--May 2, 2001

More Than 80 OEMS Worldwide Have Designed in Brooks'

Tools With Their Processes, Establishing Brooks as a Leader in the

Cluster Tool Market.

Brooks Automation, Inc. (Nasdaq: BRKS), a leader in semiconductor tool and factory automation solutions for the global semiconductor industry, announced today that it has shipped its 1000th cluster tool to a major Original Equipment Manufacturer (OEM). Brooks cluster tools can be found in the world's largest semiconductor, data storage, and flat panel display fabs, including IBM, Motorola, Seagate, Philips, ...

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