Article: Axcelis Technologies Launches IntegraNET-TM- Data Integration and Management Platform; Provides Framework For e-diagnostics and Advanced Process Control.

Business/Technology Editors

BEVERLY, Mass.--(BUSINESS WIRE)--July 16, 2001

Axcelis Technologies, Inc. (NASDAQ: ACLS), today introduced Axcelis IntegraNET(TM), a data management platform that meets the semiconductor industry's demand for increased equipment efficiency and intelligent insight into equipment performance. The Axcelis IntegraNET portfolio comprises network-based computing for all Axcelis product lines, providing manufacturers the ability to link multiple types of equipment to the fab-wide network, along with the architecture for future `intelligence' enhancements, such as e-diagnostics and advanced process control. Axcelis IntegraNET is the ...

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