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Article: SEMATECH and Oak Ridge National Laboratory to develop advanced etch program.
- Article from:
- PR Newswire
- Article date:
- December 20, 1989
CopyrightCOPYRIGHT 1989 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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SEMATECH AND OAK RIDGE NATIONAL LABORATORY
TO DEVELOP ADVANCED ETCH PROGRAM
OAK RIDGE, Tenn., Dec. 20 /PRNewswire/ -- SEMATECH, the U.S. consortium formed to recover world leadership in semiconductor manufacturing, announced today it has signed a contract with Martin Marietta Energy Systems Inc., managing contractor for Oak Ridge National Laboratory (ORNL), for the development of advanced semiconductor etch technology.
In an effort to help rebuild the semiconductor manufacturing infrastructure, SEMATECH will work with ORNL in Oak Ridge, Tennessee to develop advanced plasma etch manufacturing technology. Several experimental etch ...