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Article: Yield Learning Cycles Blast Off at Warp Speed.(KLA-Tencor non-contact in-line electrical defect monitoring system for integrated circuit production)(Brief Article)
- Article from:
- Semiconductor International
- Article date:
- November 1, 2001
- Author:
CopyrightCOPYRIGHT 2001 Reed Business Information. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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The length of yield learning cycles (the ability to find, characterize and correct the defects that limit yield on new processes), which can last up to eight weeks and cost millions per day, has been an endemic problem in semiconductor manufacturing, particularly with shrinking market windows. Simultaneously, the industry is struggling to cope with the increased expense and manufacturing roadblocks involved in bringing technologies like copper, sub-wavelength lithography and 300 mm wafers into production (Figure).
Addressing the need for accelerated yield learning, KLA-Tencor (San Jose) has introduced [micro]Loop ("Micro-Loop"), the first non-contact in-line ...
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